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SiC
+
Mechanical Application
Mechanical Seal Ring
Bearing.Bushing.Sleeve.
Shaft. Rotor
Roller. Capstan. guider
Nozzle
+
Thermal Application
Heater
?Tube, Nozzle
+
Semiconductor Application
Susceptor(CVD.GaAs)
Holder(CVD.Sputter)
Edge-ring(RTP)
Crucible.Boat.
Dummy Wafer
+
Chemical Application
??Nozzle
Chemical Pump Seal Ring
3
1919197
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Mechanical Seal Ring (1)
Mechanical Seal Ring
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